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A grinding wheel consists of three elements: abrasive grain, bond and pore, as shown in figure 1. As the wheel turns in high speed, its innumerable grains quickly ...

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The majority of semiconductor devices are built on silicon wafers. Manufacturing of high-quality silicon wafers involves several machining processes including grinding.

As a step toward the complete establishment of the silicon wafer edge treatment technique by ultrasonically assisted polishing (UAP) proposed in previous works (Yang ...

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